HS6 Subheading
848620
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits
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Other subheadings in this heading
848610Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers848620Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuitscurrent848630Machines and apparatus of a kind used solely or principally for the manufacture of flat panel displays848640Machines and apparatus of a kind used solely or principally for the manufacture or repair of masks and reticles, assembling semiconductor devices or electronic integrated circuits, or for lifting, handling, loading or unloading items of heading 8486848690Machines and apparatus of heading 8486; parts and accessories